Semiconductor test device using leakage current and compensation system of leakage current

ABSTRACT

The present invention relates to a semiconductor test device which may use a leakage current and/or a compensation system of leakage current. The semiconductor test device, according to exemplary embodiments of the present invention, may include MOS transistors which may be fabricated in processes similar to those of the semiconductor device. The semiconductor test device may sense the leakage currents which may flow in the MOS transistors, may test whether the semiconductor device may be fabricated normally or abnormally, and may generate at least a normal or abnormal signal as a result. The leakage current compensation device may compensate for the leakage current which may flow in the semiconductor device in response to the normal or abnormal signal of the semiconductor test device. According to exemplary embodiments of the present invention, abnormally-fabricated MOS transistors may be tested and malfunctions of the semiconductor device may be reduced by the leakage current compensation device.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a divisional of application No. 10/898,219 filed Jul. 26, 2004,now U.S. Pat. No. 7,116,125, which claims priority under 35 U.S.C. §119of Korean Patent Application 2003-53860 filed on Aug. 4, 2003, KoreanPatent Application 2003-53861 filed on Aug. 4, 2003, and Korean PatentApplication 2004-31461 filed on May 4, 2004 the entire contents of whichare hereby incorporated by reference.

BACKGROUND OF THE INVENTION

The present invention relates to semiconductor test devices which mayuse leakage current and compensation systems of leakage current.

Forming an MOS transistor, which may include a micro channel length, ona wafer may be difficult, more specifically, controlling the channellength of MOS transistor may be difficult. Techniques for controllingthe micro channel length (e.g., a light source of shorter wavelength, aphase shift mask (PSM), a phase edge shift mask (PEMS) and an opticalcorrect (OPC), etc.) may result in MOS transistors which may have achannel length greater than a critical channel length and may result inthe malfunctioning of a semiconductor chip.

Each of the transistors and/or simple circuits (e.g., an inverter delayand/or a ring oscillator) may be formed on a wafer simultaneously, andmay test MOS transistors. Parameters, which may indicate characteristicsof transistors, may be extracted from the transistors and/or simplecircuits, however, determining the parameters may become more difficultand may take a longer time because the semiconductor fabricationprocess, which may change the characteristic of MOS transistor, maybecome more complex. A leakage current may vary with the channel lengthin an off-mode of the MOS transistor, such that the leakage current maycause malfunctions of semiconductor chips which may be integrated withMOS transistors.

A thickness of oxide layer or layers in the MOS transistor may becomesmaller and the control of the MOS transistor may become more difficultby simplifying the semiconductor fabrication method. The leakage currentmay be increased by tunneling through the micro oxide layer and maycause the malfunctioning of the semiconductor circuits.

MOS capacitors, which may have a larger gate area, may be used at bothterminals of a power supply source, and the gate leakage current maycause an electrical leakage. The leakage current may reduce acapacitance of the MOS capacitor and the circuit, which may include thecapacitor, may operate abnormally.

SUMMARY OF THE INVENTION

Exemplary embodiments of the present invention may be directed to asemiconductor test device for testing an MOS transistor, which may befabricated abnormally, and may cause at least one malfunction which maybe due to a channel leakage current, in an off-mode.

Exemplary embodiments of the present invention may provide asemiconductor test device which may test a MOS transistor, which may befabricated abnormally and may cause at least one malfunction due to agate leakage current.

Exemplary embodiments of the present invention may provide a MOStransistor current compensation device which may compensate for aleakage current of a semiconductor device, which may be fabricatedabnormally and may suffer from a leakage current.

A semiconductor test device according to an exemplary embodiment of thepresent invention may test a semiconductor device which may include atleast one MOS transistor. The semiconductor test device may include afirst leakage current source which may generate a first leakage currentvariably according to whether the MOS transistors may be fabricatednormally, a second leakage current source which may generate a secondleakage current variably according to whether the MOS transistors may befabricated normally, and a comparator which may compare the firstleakage current with the second leakage current and may determinewhether the semiconductor device may be fabricated normally.

The first leakage current may be smaller than the second leakagecurrent, and the MOS transistors may be fabricated normally; the firstleakage current may be larger than the second leakage current, and theMOS transistors may be fabricated abnormally.

In exemplary embodiments of the present invention, the first and secondleakage current sources may be MOS transistors.

In exemplary embodiments of the present invention, a semiconductor testdevice, which may use a leakage current, may include a first MOStransistor, a second MOS transistor and a comparator. The first MOStransistor may flow a first leakage current (referred to as I1) througha channel, which may have a critical channel length (referred to as L1)and/or a first leakage current (referred to as I1′) through a channelwhich may have a channel length (referred to as L1′) shorter than the L1by ΔL1, in an off-mode. The second MOS transistor may flow a secondleakage current (referred to as I2) through a channel, which may have acritical channel length (referred to as L2) longer than the L1 and/or asecond leakage current (referred to as I2′) through a channel which mayhave a channel length (referred to as L2′) shorter than the L2 by ΔL2,in an off-mode. The comparator may compare the first leakage currentwith the second leakage current, and may determine whether thesemiconductor device may be fabricated normally. The first MOStransistor may have a channel width W1 which may meet the conditions ofI1<I2 and I1′>I2′. The second MOS transistor may have a channel width W2which may meet conditions of I2>I1 and I2′<I1′.

In another exemplary embodiment of the present invention, thesemiconductor test device which may use leakage current, may include afirst MOS capacitor, a second MOS capacitor and a comparator. The firstMOS capacitor may flow a first leakage current (referred to as J1)through an oxide layer which may have a critical thickness (referred toas T1) and/or a first leakage current (referred to as J1′) through anoxide layer which may have a thickness (referred to as T1′) smaller thanthe T1 by ΔT1. The second MOS capacitor may flow a second leakagecurrent (referred to as J2) through an oxide layer which may have acritical thickness (referred to as T2) larger than T1 and/or a secondleakage current (referred to as J2′) through an oxide layer which mayhave a thickness (referred to as T2′) smaller than the T2 by ΔT2. Thecomparator may compare the first leakage current with the second leakagecurrents and may determine whether the semiconductor device may befabricated normally. The first MOS capacitor may have a gate area A1which may meet the conditions of J1<J2 and J1′>J2′, and the second MOScapacitor may have a gate area A2 which may meet conditions of J1<J2 andJ1′>J2′.

In another exemplary embodiment of the present invention, a compensationsystem of leakage current may include a semiconductor device which mayfurther include one or more MOS transistors, a semiconductor test deviceand a leakage current compensation device. The semiconductor test devicemay include first and second MOS transistors, which may be fabricatedusing the same, or similar, process as the MOS transistor and maycompare first leakage current with second leakage current which may flowin the first and second MOS transistors, respectively, and may testwhether the MOS transistors of the semiconductor device may befabricated normally. The leakage current compensation device maycompensate for the leakage current which may flow in the MOS transistorsof the semiconductor device and may be in response to an output signalof the semiconductor test device.

In exemplary embodiments of the present invention, the leakage currentcompensation device may provide the leakage current for the MOStransistors in response to an abnormal signal of the semiconductor testdevice if the semiconductor device may be fabricated abnormally, and maygenerate the leakage current in the MOS transistors.

In another exemplary embodiment of the present invention, a comparatormay be provided which may receive at least a first leakage current and asecond leakage current, may comparing the at least first and a secondleakage current, and may output at least one output signal. The outputsignal may be in accordance with a result of the comparison of the atleast first and second leakage currents.

The comparator, according to exemplary embodiments of the presentinvention, may include at least two transistors for receiving andcomparing the at least two leakage currents, and at least one output foroutputting at least one output signal. The comparing of the at least twoleakage currents may include, outputting at least one output signal if afirst leakage current may be greater than a second leakage current, andoutputting at least one other output signal if a first leakage currentmay be less than a second leakage current.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the invention, and are incorporated in and constitute apart of this specification. The drawings illustrate example embodimentsof the present invention and, together with the description, serve toexplain principles of the present invention. In the drawings:

FIG. 1 is a block diagram illustrating an exemplary embodiment of asemiconductor test device which may use a channel leakage current;

FIG. 2 is a schematic graph illustrating an example of a variation ofthe leakage current according to a variation of the channel length;.

FIG. 3 is a circuit diagram illustrating an exemplary embodiment of thecomparator in FIG. 1;

FIG. 4 is a circuit diagram illustrating an exemplary embodiment of thecomparator in FIG. 1;

FIG. 5 is a circuit diagram illustrating another exemplary embodiment ofa semiconductor test device which may use a channel leakage current;

FIG. 6 is a block diagram illustrating another exemplary embodiment of asemiconductor test device which may use a gate leakage current;

FIG. 7 is a schematic graph illustrating an example of a variation ofleakage current according to a thickness variation of oxide layer;

FIG. 8 is a circuit diagram illustrating an exemplary embodiment of thecomparator in FIG. 6;

FIG. 9 is a circuit diagram illustrating an exemplary embodiment of thecomparator in FIG. 6;

FIG. 10 is a circuit diagram illustrating another exemplary embodimentof a semiconductor test device which may use a gate leakage current;

FIG. 11 is a circuit diagram illustrating an exemplary embodiment of acompensation system of leakage current; and

FIG. 12 is a circuit diagram illustrating an exemplary embodiment of anNMOS logic circuit in FIG. 11.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS OF THE PRESENT INVENTION

The present invention will be described more fully with reference to theaccompanying drawings, in which exemplary embodiments of the inventionare shown. It should be understood, however, that exemplary embodimentsof the present invention described herein can be modified in form anddetail without departing from the spirit and scope of the invention.Accordingly, the exemplary embodiments described herein are provided byway of example and not of limitation, and the scope of the presentinvention is not restricted to the particular embodiments describedherein.

In particular, the relative thicknesses and positioning of layers orregions may be reduced or exaggerated for clarity. Further, a layer isconsidered as being formed “on” another layer or a substrate when formedeither directly on the referenced layer or the substrate or formed onother layers or patterns overlaying the referenced layer.

FIG. 1 illustrates an exemplary embodiment of a semiconductor testdevice which may use leakage current according to the present invention.Referring to FIG. 1, a semiconductor test device 100 may include a firstleakage current source 110, a second leakage current source 120 and acomparator 130.

The first and second leakage current sources 110 and 120 may compriseNMOS transistors T1 and T2, respectively. A ground voltage Vss may beapplied to gates of the NMOS transistors T1 and T2, such that a channelmay not be formed in an off-mode. The first and second leakage currentsources 110 and 120 may provide first and second leakage currents I1 andI2 which may be for channels of the NMOS transistors T1 and T2,respectively, in the off mode. In FIG. 1, the first and second leakagecurrent sources 110 and 120 may NMOS transistors but they can bereplaced by PMOS transistors as well known to those skilled in the art.

The comparator 130 compares a first leakage current I1 may flow throughthe first leakage current source 110 and a second leakage current I2 mayflow through the second leakage current source 120 to generate an outputsignal as a result. The output signal may indicate whether thesemiconductor device (not shown) to be tested may be fabricatednormally. The semiconductor device may be a circuit which may include aMOS transistor (e.g., an NMOS logic circuit in FIG. 11) and may befabricated along with the semiconductor test device 100. Thesemiconductor test device 100 may be fabricated simultaneously and/or inthe same circuit as the semiconductor device to be tested, that is, eachsemiconductor device may have a corresponding semiconductor test device.The semiconductor test device 100 may also be fabricated in differentcircuits than, and may be applied to, a plurality of semiconductordevices (not shown).

FIG. 2 is a schematic graph illustrating an example of a variation ofthe leakage current according to a variation of channel length. Aparallel axis of the graph may indicate a channel length L of the MOStransistor, and a vertical axis may indicate a leakage current I_(off)which may flow through a channel of the MOS transistor in the off-mode.

Channel lengths of NMOS transistors T1 and T2 illustrated in FIG. 1 maybe referred to as L1 and L2, respectively. The leakage currents whichmay flow through the channel may be referred to as I1 and I2,respectively. A critical channel length and a channel length oftransistor may be defined as L1. A leakage current may vary in aninterval where the channel length may be shorter than L1 (the criticalchannel length). The leakage current may not vary in an interval wherethe channel length may be larger than L1. The vertical axis of the graphmay have a log scale. If the channel of the MOS transistor may beshorter than the critical channel length, the leakage current mayincrease drastically and may cause abnormal operation of the circuit. L2may belong to the interval where the channel length may be larger thanthe critical channel length L1.

Channel lengths L1′ and L2′, which may be reduced in a semiconductorfabrication process, may be referred to as L1′ and L2′, respectively,and the leakage currents which may flow through the channel may bereferred to as I1′ and I2′, respectively. The variation of the channellengths may be ΔL1=L1−L1′ and ΔL2=L2−L2′, respectively. If ΔL1=ΔL2, thevariation of the channel length in the semiconductor fabrication processmay be larger than that of smaller channel length, that is,ΔL1/L1□ΔL2/L2.

The semiconductor test device 100 may use a channel leakage currentaccording exemplary embodiments of the present invention and maydetermine a channel width W1 of the first leakage current source 110 anda channel width W2 of the second leakage current source 120.

The fabrication process may be performed normally, and the channellengths of the first and second leakage current sources 110 and 120become L1 and L2, respectively; the leakage current I2 of the leakagecurrent source 120 may be larger than the leakage current I1 of theleakage current sources 110 (i.e. I2>I1). The fabrication process may beabnormally performed, and the channel lengths of the first and secondleakage current sources 110 and 120 become L1′ and L2, respectively; theleakage current I2′ of the leakage current source 120 may be larger thanthe leakage current I1′ of the leakage current source 120 (I2′>I1′).

For example, L1=0.1 μm, L1′=0.12 μm, L2=0.18 μm, L2′=0.17 μm, I1=2 nA,I1′=100 nA and the channel width W1 of the first leakage current source110 may be W1. A channel width W2 of the second leakage current source120 may be defined to make I2 smaller than I1 and I2′ smaller than I1′.

The first and second leakage current sources 110 and 120, which mayinclude W1 and W2 satisfying the above relationship, may be used in thecircuit in FIG. 1 and may be embodied with MOS transistors which mayhave a channel length greater than the target channel length.

FIG. 3 is an example of a circuit diagram illustrating an exemplaryembodiment of the comparator in FIG. 1. Referring to FIG. 3, thecomparator 130 may include at least two NMOS transistors N1 and N2, atleast four PMOS transistors P1˜P4, and at least two inverters INV1 andINV2.

The Enable signal may be ‘L’, the PMOS transistors P1 and P4 may beturned-on, the NMOS transistors N3 may be turned-off, and Nodes 1 and 2may become ‘H’.

Nodes 1 and 2 may be ‘H’, the PMOS transistors P2 and P3 may be turnedoff, the NMOS transistors N1 and N2 may be turned-on, the Enable signalmay be ‘H’, the PMOS transistors P1 and P4 may be turned-off and theNMOS transistor N3 may be turned-on.

The second leakage current I2 may be larger than the first leakagecurrent I2, a node 2 may become ‘L’, a node 1 may become ‘H’, an outputsignal Output_1 may become ‘L’, and an output signal Output_2 may become‘H’, when the first and second leakage current sources 110 and 120 maybe fabricated normally (i.e., the channel lengths are L1 and L2,respectively).

The second leakage current I2′ may be smaller than the first leakagecurrent I1′, the node 2 may become ‘H’, the node 1 may become ‘L’, theoutput signal Output_1 may become ‘H’, and the output signal Output_2may become ‘L’, when the first and second leakage current sources 110and 120 may have been fabricated abnormally (i.e., channel lengths areL1′ and L2′). The output signal from the comparator 130 may notifywhether the semiconductor device (not shown) may have been fabricatednormally.

FIG. 4 is an example of a circuit diagram illustrating another exemplaryembodiment of the comparator in FIG. 1. Referring to FIG. 4, thecomparator 130 may comprise at least two PMOS transistors P5 and P6. TheEnable signal may be in a state ‘H’, and the NMOS transistor N4 may beturned-on.

The first leakage current I2 may be larger than the first leakagecurrent I1, the node 2 may become ‘L’, the node 1 may become ‘H’, andthe output signal Output may become ‘L’, when the first and secondleakage current sources 110 and 120 may have been fabricated normally(i.e., the channel lengths are L1 and L2 respectively).

The second leakage current I2′ may be smaller than the first leakagecurrent I1′, the node 2 may become ‘H’, the node 1 may become ‘L’, andthe output signal Output may become ‘H’, when the first and secondleakage current sources 110 and 120 may have been fabricated abnormally(i.e., the channel lengths are L1′ and L2′, respectively). Thesemiconductor device (not shown) may be fabricated abnormally, and theoutput signal Output of ‘H’ may be generated from the comparator 130.

FIG. 5 is an example of a circuit diagram illustrating another exemplaryembodiment of the semiconductor test device which may use a channelleakage current. Referring to FIG. 5, the semiconductor test device,according to an exemplary embodiment of the present invention maycomprise at least two semiconductor test devices in FIG. 4 which may beconnected in parallel.

The Enable signal may be ‘H’, and the NMOS transistor N5 may beturned-on. The second leakage current I2 may be larger than the firstleakage current I1, nodes 2 and 4 may become ‘L’, nodes 1 and 3 maybecome ‘H’, an output signal Output_1 may become ‘L’, and an outputsignal Output_2 may become ‘H’, when the first leakage current sources111 and 112 and second leakage current sources 121 and 122 may have beenfabricated normally (i.e., the channel lengths may be L1 and L2,respectively).

The second leakage current I2′ may be smaller than the first leakagecurrent I1′, the nodes 2 and 4 may become ‘H’, the nodes 1 and 3 maybecome ‘L’, the output signal Output_1 may become ‘H’, and the outputsignal Output_2 may become ‘L’, when the first leakage current sources111 and 112 and the second leakage current sources 121 and 122 may havebeen fabricated abnormally (i.e., if the channel lengths may be L1′ andL2′). The semiconductor device (not shown) may be determined to havebeen normally or fabricated abnormally through an output signal.

FIG. 6 illustrates an exemplary embodiment of the semiconductor testdevice which may use a gate leakage current. Referring to FIG. 6, thesemiconductor test device 200 may include a first leakage current 210, asecond leakage current 220, and a comparator 230. The first and secondleakage current sources 210 and 220 may comprise at least NMOStransistors C1 and C2. The NMOS transistors C1 and C2 may form a MOScapacitor when the drain and source may be connected to each other. Thefirst and second leakage current sources 210 and 220 may flow first andsecond leakage currents J1 and J2 through gates of the NMOS transistorsC1 and C2, respectively. In FIG. 6, the first and second current sources210 and 220 may be an NMOS transistor.

The comparator 230 may compare a first leakage current J1, which mayflow through the first leakage current source 210, with a second leakagecurrent J2, which may flow through the second leakage current source J2,and may generate the output signal Output. The output signal may notifythe semiconductor device (not shown), which may be tested, may have beenfabricated normally.

FIG. 7 is a schematic graph illustrating an example of a variation of aleakage current according to an example of a thickness variation of theoxide layer. A parallel axis of the graph may indicate a thickness ofoxide (Tox) of the MOS transistor. A vertical axis may indicate aleakage current Jg which may flow through a gate of the MOS transistor.

Thicknesses of the NMOS transistor C1 and C2 may be referred to as T1and T2, respectively, and a leakage current which may flow through thegate may be referred to as J1 and J2, respectively. The leakage currentsof the gate may be referred to as J1 and J2, respectively. T1 may be acritical thickness of oxide layer and may be a thickness of oxide layerof the transistor. The leakage current may vary in an interval where thethickness of oxide layer may be smaller than the critical thickness ofoxide layer. The leakage current may not vary in an interval where thethickness of oxide layer may be larger than the critical one. T2 may bea thickness of oxide layer which may belong to the interval where thethickness of oxide layer may be larger than T1.

Thicknesses of oxide layers, which may be reduced during a semiconductorfabrication process, may be referred to as T1′ and T2′, and the leakagecurrents, which may flow through the gate, may be referred to as J1′ andJ2′. The variations of thickness of oxide layer may be ΔT1=T1−T1′ andΔT2=T2−T2′. If ΔT1=ΔT2, thickness variation rate of oxide layer may belarger at the oxide layer which may have a smaller thickness, that is,ΔT1/T1□ΔT2/T2.

The semiconductor test device 200, which may use gate leakage current,may determine a gate area A1 of the first leakage current source 210 anda gate area A2 of the second leakage current source 220. The leakagecurrents may have a relationship of J2>J1, if the semiconductorfabrication process may be performed normally, and may form the oxidelayers of the first and second leakage current sources 210 and 220 (forexample, the transistors and/or capacitors as described herein) whichmay have thicknesses of T1 and T2, respectively. The leakage currentsmay have a relationship of J2′<J1′, for example, T1=28 □, T1′=0.12□,T2=34□ and T2′=32□, if the semiconductor fabrication process may beperformed abnormally, and may form the oxide layers of the first andsecond leakage current sources 210 and 220 which may have thicknessesT1′ and T2′, respectively. For example, J1=1p□, J1′=1n□, and the gatearea of the first leakage current source 210 may be A1, the gate area A2of the second leakage current source 220 may be determined to meet thecondition of J2>J1, and J2′<J1′.

The circuit in FIG. 6 may use the first leakage current source 210,which may have the gate area A1, the second leakage current source 220,which may have the gate area A2, in accordance with the aboverelationship, and the MOS transistors may have an oxide layer of whichthe thickness may be greater than the critical thickness.

FIG. 8 is a circuit diagram of a exemplary embodiment of the comparatorin FIG. 6. Referring to FIG. 8, the comparator 230 may comprise at leasttwo NMOS transistors N1 and N2, at least four PMOS transistors P1 to P4,and at least two inverters INV1 and INV2. The operation principle of thecomparator 230 may be similar or identical to the comparator 130. Theoutput signal of the comparator 230 may be a ground and may determinewhether the semiconductor device (not shown) may be fabricated normally.

FIG. 9 is an example of a circuit diagram illustrating another exemplaryembodiment of the comparator in FIG. 6. Referring to FIG. 9, thecomparator 230 may comprise at least two PMOS transistors P5 and P6. Thecomparator 230 may operate on the same or similar principle as in FIG.4.

FIG. 10 is a circuit diagram illustrating another exemplary embodimentof the semiconductor test device may use a gate leakage. Thesemiconductor test device may operate on the same principle as that inFIG. 5.

FIG. 11 is a circuit diagram illustrating a compensation system ofleakage current which may use a semiconductor test device, such assemiconductor test device 100. Referring to FIG. 11, the output signalof the semiconductor test device 100 may be input to a leakage currentcompensation device 300 via an inverter INV3. The leakage currentcompensation device 300 may comprise first and second compensationcircuits 310 and 320, and may compensate the leakage current which mayflow in the NMOS logic circuit 400.

The NMOS logic circuit 400 may include one or more NMOS transistors. Thechannel length of the NMOS transistor may have been fabricatedabnormally, and the NMOS logic circuit 400 may perform abnormaloperations because a leakage current may flow rapidly in an off-mode. Asemiconductor test device 100 may detect a leakage current which mayflow in the NMOS logic circuit 400 and a leakage current compensationdevice 300 may compensate for the leakage current of the NMOS logiccircuit.

When the clock signal CLK may be in a first logic state (for example,“low” or ‘L’), a PMOS transistor M4 may be turned on, an NMOS transistorM5 may be turned off, and node A may be in a second logic state (forexample, “high” or ‘H’). When the clock signal CLK may be ‘H’, the PMOStransistor M4 may be turned off and the NMOS transistor M5 may be turnedon. When the NMOS logic circuit 400 may be in the off-mode by the inputsignals IN1, IN2, . . . , and INn, the node A may be ‘H’. If thesemiconductor fabrication process may be abnormally performed, which mayform the channel lengths of the NMOS transistors in the NMOS logiccircuit 400 smaller than the critical channel length, the leakagecurrent may increase in the off-mode, and it may be possible that thestate of the node A may be changed to ‘L’.

The semiconductor test device 100 may sense the leakage current, whichmay flow in the off-mode due to abnormally-fabricated NMOS logic circuit400, and may generate an output signal ‘Output’.

The leakage current compensation device 300 may reduce the probabilityof the node from being changed to ‘L’ unexpectedly. The firstcompensation circuit 310 may comprise at least one PMOS transistor M1and may compensate for the leakage current, which may flow in the NMOSlogic circuit 400, when the semiconductor fabrication process may beperformed normally. If the leakage current may increase due to theabnormal process, a second compensation circuit 320 may be included inaddition to the first compensation circuit 310.

When the channel length may be fabricated normally, a normal signal ‘L’may be generated as the output signal ‘Output’ of the semiconductor testdevice 100. When the channel length may be fabricated abnormally, theabnormal signal ‘H’ may be generated. The signals may pass through theinverter INV3 and may be inverted and the inverted signal may be inputto the second compensation circuit 320. If the channel length may benormal, the signal ‘H’ may be input to the second compensation circuit320, and if abnormal, the signal ‘L’ may be input.

When the semiconductor fabrication process may be performed normally,which may form the channel length normally; the signal ‘H’ may be inputto the second compensation circuit 320, may make the PMOS transistor M2turn off, and the second compensation circuit 320 may not operate. Whenthe semiconductor fabrication process may be carried out abnormally,which may make the channel length abnormal, the leakage current mayincrease rapidly, and the semiconductor test device 100 may generate anabnormal signal ‘L’ which may be input to the second compensationcircuit 320. The PMOS transistor M2 may be turned on and may provide anadditional current for node A according to the output ‘Output’, suchthat an unstable state of node A or a logic fail, which may be caused bythe leakage current of the NMOS logic circuit 400.

FIG. 12 illustrates an exemplary embodiment of the compensation systemof leakage current in FIG. 11. Referring to FIG. 12, the structure ofthe first and second compensation circuits 310 and 320 and an operationprinciple may be similar to those in FIG. 11. In FIG. 12, the clocksignal CLK may be ‘H’ and input terminals IN1 to IN6 of the NMOS logiccircuit 400 may be grounded, such that the NMOS transistors may be inthe off-mode. If the NMOS transistors may have been fabricated normally,the first compensation circuit 310 may reduce the probability of anunstable state of the node A and/or the probability of a logic fail maybe reduced because of the small leakage current. If the NMOS transistorsmay have been fabricated abnormally, which may increase the leakagecurrent rapidly, the second compensation circuit 320 may begin tocompensate for the loss, which may be due to the leakage current, andmay reduce the probability of an unstable state of the node A.

In FIGS. 11 and 12, the semiconductor test device 100, which may use thechannel leakage current, may be explained as an exemplary embodiment ofthe compensation system of leakage current, but it may be well known tothose skilled in the art that the semiconductor test device 100 may usea gate leakage current which may operate on a similar principle, thesame principle, or any other principle as desired by one of ordinaryskill in the art.

According to exemplary embodiments of the present invention, asemiconductor test device, which may use the channel leakage current maytest a MOS transistor, which may be fabricated to have a channel lengthsmaller than the critical one during a semiconductor fabricationprocess. The semiconductor test device, which may use a gate leakagecurrent according to exemplary embodiments of the present invention, maytest a MOS transistor, which may be fabricated to have an oxide layerthinner than a critical thickness during the semiconductor fabricationprocess. According to exemplary embodiments of the compensation systemof leakage current, malfunctioning of circuit, which may be due to theleakage current, may be reduced.

Although exemplary embodiments of the present invention have beendescribed as including NMOS transistors, it will be known that anytransistor, for example, a PMOS transistor, may be used in exemplaryembodiments of the present invention as desired by one of ordinary skillin the art.

Although exemplary embodiments of the present invention have beendescribed as comparing MOS transistor leakage current in determiningwhether a semiconductor devices may be fabricated normally, it will beunderstood that any current, for example, a channel or gate current, maybe used as desired by one of ordinary skill in the art.

Although exemplary embodiments of the present invention have beendescribed as using a first logic state ‘L’ and a second logic state ‘H’,it will be understood by one of ordinary skill in the art that thesefirst and second logic states are interchangeable, for example a firstlogic state may be ‘H’ and a second logic state may be ‘L’, withoutdeparting from the scope and spirit of the invention.

Although exemplary embodiments of the present invention have beendescribed in connection with the accompanying drawings, it is notlimited thereto. It will be apparent to those skilled in the art thatvarious substitution, modifications and changes may be thereto withoutdeparting from the scope and spirit of the invention.

1. A compensation system comprising: a semiconductor test deviceincluding first and second MOS transistors and a comparator, the firstand second MOS transistors being fabricated in the same process as MOStransistors of a semiconductor device, and the comparator beingconfigured to compare first and second leakage currents flowing in thefirst and second MOS transistors to test whether the MOS transistors ofthe semiconductor device are fabricated normally; and a leakage currentcompensation device configured to compensate for leakage current flowingin the MOS transistors of the semiconductor device in response to anoutput signal from the semiconductor test device.
 2. The system of claim1, wherein the first MOS transistor flows a first leakage currentthrough a channel having a critical channel length or a first leakagecurrent through an oxide layer having a channel length smaller than thecritical channel length, in an off-mode, the second MOS transistor flowsa second leakage current through a channel having a critical channellength larger than the critical channel length or a second leakagecurrent through a channel having a thickness smaller than a secondchannel length, in an off-mode, and the comparator compares the firstleakage current with second leakage current to determine whether thesemiconductor device is fabricated normally, wherein the first MOStransistor has a first channel width such that the first leakage currentis less than the second leakage current when the MOS transistors arefabricated normally, and the first leakage current is less than thesecond leakage current if the MOS transistors are fabricated abnormally,and wherein the second MOS transistor has a second channel width suchthat the second leakage current is greater than the first leakagecurrent when the MOS transistors are fabricated normally, and the secondleakage current is less then the first leakage current when the MOStransistors are fabricated abnormally.
 3. The system of claim 1, whereinthe compensation system of leakage current provides a leakage currentfor the MOS transistors in response to an abnormal signal of thesemiconductor test device in case that the semiconductor device isfabricated abnormally to cause leakage current in the MOS transistors.4. A compensation system comprising: a semiconductor test deviceincluding first and second leakage current sources and a comparator, thefirst and second leakage current sources being fabricated in the sameprocess as at least one potential leakage current sources of asemiconductor device, and the comparator being configured to comparefirst and second leakage currents flowing in the first and secondleakage current sources to test whether the at least one potentialleakage current source is fabricated normally; and a leakage currentcompensation device configured to compensate for leakage current flowingin the at least one potential leakage current source in response to anoutput signal from the semiconductor test device.
 5. The system of claim4, wherein the first leakage current source includes a first MOScapacitor flowing a first leakage current through an oxide layer havinga thickness less than or equal to a critical thickness, the secondleakage current source includes a second MOS capacitor flowing a secondleakage current through an oxide layer having a thickness greater thanthe critical thickness, but less than a second thickness, and thecomparator compares the first leakage current with the second leakagecurrent to determine whether the semiconductor device is fabricatednormally, wherein the first MOS capacitor and the second MOS capacitorhave gate areas A1 and A2, respectively, such that the first leakagecurrent is less than the second leakage current when the MOS transistorsare fabricated normally, and the first leakage current is greater thanthe second leakage current when the MOS transistors are fabricatedabnormally.
 6. The compensation system of claim 4, wherein if thecomparator determines that the first leakage current is smaller than thesecond leakage current, the at least one potential leakage currentsource is fabricated normally, and if the first leakage current islarger than the second leakage current, the at least one potentialleakage current source is fabricated abnormally.
 7. The compensationsystem of claim 4, wherein the first and second leakage current sourceseach include at least one transistor.
 8. The compensation system ofclaim 7, wherein the first and second transistors are NMOS transistors.9. The compensation system of claim 7, wherein the first and secondtransistors are PMOS transistors.
 10. The compensation system of claim4, wherein the first leakage current source is a first transistordesigned for flowing a first leakage current through a channel having acritical channel length or a first leakage current through a channelhaving a channel length shorter than the critical channel length, in anoff-mode, the second leakage current source is a second transistordesigned for flowing a second leakage current through a channel having achannel length longer than the critical channel length or a secondleakage current through a channel having a channel length shorter than asecond channel length, in an off-mode, the first transistor has achannel width W1 such that the first leakage current is less than thesecond leakage current when the at least one potential leakage currentsource is fabricated normally, and the first leakage current is lessthan the second leakage current if the at least one potential leakagecurrent source is fabricated abnormally, and the second transistor has achannel width W2 such that the second leakage current is greater thanthe first leakage current when the at least one potential leakagecurrent source is fabricated normally, and the second leakage current isless then the first leakage current when the at least one potentialleakage current source is fabricated abnormally.
 11. The compensationsystem of claim 10, wherein the comparator generates a normal signalwhen the second leakage current is greater than the first leakagecurrent, and an abnormal signal when the first leakage current isgreater than the second leakage current.
 12. The compensation system ofclaim 4, wherein the first leakage current source is a first capacitorflowing a first leakage current through an oxide layer having athickness less than or equal to a critical thickness, the second leakagecurrent source is a second capacitor flowing a second leakage currentthrough an oxide layer having a thickness greater than the criticalthickness, but less than a second thickness, and wherein the firstcapacitor and the second capacitor have gate areas A1 and A2,respectively, such that the first leakage current is less than thesecond leakage current when the at least one potential leakage currentsource is fabricated normally, and the first leakage current is greaterthan the second leakage current when the at least one potential leakagecurrent source is fabricated abnormally.
 13. The compensation system ofclaim 12, wherein the comparator generates a normal signal when thesecond leakage current is greater than the first leakage current, and anabnormal signal when the second leakage current is less than the firstleakage current.